Unit 1 Basis of Materials Science
1.1 Introduction
1.2 Materials Science and Engineering
1.3 Classification of Materials
1.4 Advanced Materials
1.5 Microstructure characterization of Materials
Unit 2 Plasmas
2.1 DC Glow Discharge
2.2 RF Discharges
2.3 High-Density Plasmas
Unit 3 Vacuum Technology
3.1 Pressure Ranges and Vacuum Pumps
3.2 Vacuum Seals and Pressure Measurement
Unit 4 Thin Film Deposition
4.1 Physical Deposition
4.2 Chemical Deposition
4.3 Epitaxial Growth
Unit 5 Devices Fabrication Process
5.1 Introduction
5.2 Ion implantation
5.3 Photolithography
5.4 Etch
5.5 Metallization
5.6 Process Integration
Unit 6 Reading Practice
6.1 Paper
6.2 Patent
6.3 Manual Guide
Unit 7 Writing Practice
7.1 Structure of Paper
7.2 Example 1
7.3 Example 2
內容試閱：
Materials science is an interdisciplinary field applying
the properties of matter to various areas of science and
engineering. This scientific field investigates the relationship
between the structure of materials at atomic or molecular
scales and their macroscopic properties.
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